TECHNOLOGY / 01

Heterogeneous 3D Integration · Full-Stack Process

Process is infrastructure. Hanhua places heterogeneous 3D integration at the core, supported by full-stack GaN epitaxy, to provide a new integrated manufacturing foundation for the post-Moore era.

HETEROGENEOUS 3D INTEGRATION

Full Stack 3DIC

Heterogeneous 3D Integration

Wafer-level hybrid bonding closes the final gap in mixed-signal integration. Select a process stage to explore the path from wafer to volume production.

Heterogeneous 3D integration process illustration3DIC image / replaceable in admin

Wafer Debonding

8-Inch Wafer-Level Silicon Removal

Controlled 8-inch wafer-level debonding enables intact large-area transfer with yield above 95%, establishing a production foundation for subsequent compound-semiconductor and silicon-IC bonding.

8 InchWafer-Level Platform
>95%Process Yield
Production GradeLarge-Area Intact Transfer

3D Bonding

Room-Temperature Hybrid Bonding & 3D Stacking

Room-temperature hybrid bonding delivers alignment precision below 500 nm, TSV compatibility and support for compound semiconductors, MEMS, lithium niobate and other materials.

<500nmAlignment Precision
TSVProcess Compatible
3DMulti-Material Stacking

Open PDK

Seamless Integration with CMOS Design Flows

Open DRC/LVS rule files, layout templates and simulation models, together with the world's first 8-inch CMOS-compatible Micro-LED PDK, lower the barrier to heterogeneous-integration design and verification.

DRC / LVSDesign Rule Verification
LayoutLayout Templates
SimulationSimulation Models

One-stop Foundry

From Prototype to Volume Manufacturing

A unified flow from incoming epitaxy through silicon removal, bonding, packaging and testing supports prototypes, pilot runs and volume production.

PrototypePrototype Validation
PilotPilot Production
MassVolume Manufacturing

Full Stack GaN

Full-Stack GaN Epitaxy · Supporting Capability

Defining the performance ceiling and providing a high-quality material foundation for 3D integration.

  • Optoelectronic epitaxy:Full-color silicon-based GaN Micro-LED supports AR/VR, digital headlights, optical interconnects and related applications.
  • Power epitaxy:High-efficiency energy conversion supports AI power, data-center PSUs, robotic drives and related applications.

High-quality epitaxial materials form a solid foundation for heterogeneous integration.

GaN epitaxy process illustrationGaN epitaxy image / replaceable in admin

Scale Heterogeneous Integration Faster

Validate next-generation chips with Hanhua, from PDKs and process modules to one-stop foundry services.

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